dc.contributor.author |
Watkins, Lionel |
en |
dc.contributor.author |
Shamailov, Samira |
en |
dc.date.accessioned |
2012-03-27T20:38:39Z |
en |
dc.date.issued |
2010 |
en |
dc.identifier.citation |
Applied Optics 49(16):3231-3234 2010 |
en |
dc.identifier.issn |
0003-6935 |
en |
dc.identifier.uri |
http://hdl.handle.net/2292/15691 |
en |
dc.description.abstract |
We present a spectroscopic, autocollimating ellipsometer capable of operating at arbitrary angles of incidence. Linearly polarized light incident on a sample is circularly polarized on reflection, ensuring that the retroreflected beam is orthogonal to the input polarization state. In order to achieve this at arbitrary angles of incidence, a Soleil–Babinet compensator (SBC) is introduced with its fast axis fixed horizontally. Nulling is achieved by varying the SBC delay and the azimuthal angle of the input linear polarization. A single calibration equation at a fixed wavelength and a knowledge of the wavelength dependence of the compensator birefringence enables the delay to be accurately calculated at any wavelength. Singlewavelength, variable angle of incidence measurements made on a thick gold film are in excellent agreement with those obtained with a traditional null ellipsometer. Spectroscopic measurements at a fixed angle of incidence of a silicon dioxide film on a silicon substrate yield thicknesses that are in excellent agreement with independent measurements made with a null ellipsometer and a commercial instrument. |
en |
dc.publisher |
Optical Society of America |
en |
dc.relation.ispartofseries |
Applied Optics |
en |
dc.rights |
Items in ResearchSpace are protected by copyright, with all rights reserved, unless otherwise indicated. Previously published items are made available in accordance with the copyright policy of the publisher. Details obtained from: http://www.sherpa.ac.uk/romeo/issn/0003-6935/ |
en |
dc.rights.uri |
https://researchspace.auckland.ac.nz/docs/uoa-docs/rights.htm |
en |
dc.title |
Variable angle of incidence spectroscopic autocollimating ellipsometer |
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dc.type |
Journal Article |
en |
dc.identifier.doi |
10.1364/AO.49.003231 |
en |
pubs.issue |
16 |
en |
pubs.begin-page |
3231 |
en |
pubs.volume |
49 |
en |
dc.rights.holder |
Copyright: Optical Society of America |
en |
dc.identifier.pmid |
20517395 |
en |
pubs.end-page |
3234 |
en |
dc.rights.accessrights |
http://purl.org/eprint/accessRights/RestrictedAccess |
en |
pubs.subtype |
Article |
en |
pubs.elements-id |
119619 |
en |
dc.identifier.eissn |
1539-4522 |
en |
pubs.record-created-at-source-date |
2012-03-28 |
en |
pubs.dimensions-id |
20517395 |
en |