dc.contributor.author |
Lee, Jim |
en |
dc.contributor.author |
Metson, James |
en |
dc.contributor.author |
Evans, PJ |
en |
dc.contributor.author |
Kinsey, R |
en |
dc.contributor.author |
Bhattacharyya, Debes |
en |
dc.date.accessioned |
2012-05-15T02:35:53Z |
en |
dc.date.issued |
2007 |
en |
dc.identifier.citation |
Applied Surface Science 253(9):4317-4321 2007 |
en |
dc.identifier.issn |
0169-4332 |
en |
dc.identifier.uri |
http://hdl.handle.net/2292/17984 |
en |
dc.description.abstract |
Magnetron sputtered polycrystalline ZnO thin films were implanted using Al, Ag, Sn, Sb and codoped with TiN in order to improve the conductivity and to attempt to achieve p-type behaviour. Structural and electrical properties of the implanted ZnO thin films were examined with X-ray diffractometry (XRD), scanning electron microscopy (SEM), secondary ion mass spectrometry (SIMS), atomic force microscopy (AFM) and conductivity measurements. Depth profiles of the implanted elements varied with the implant species. Implantation causes a partial amorphisation of the crystalline structure and decreases the effective grain size of the films. One of the findings is the improvement, as a consequence of implantation, in the conductivity of initially poorly conductive samples. Heavy doping may help for the conversion of conduction type of ZnO thin films. Annealing in vacuum mitigated structural damage and stress caused by implantation, and improved the conductivity of the implanted ZnO thin films. |
en |
dc.publisher |
Elsevier B.V. |
en |
dc.relation.ispartofseries |
Applied Surface Science |
en |
dc.rights |
Items in ResearchSpace are protected by copyright, with all rights reserved, unless otherwise indicated. Previously published items are made available in accordance with the copyright policy of the publisher. Details obtained from http://www.sherpa.ac.uk/romeo/issn/0169-4332/ |
en |
dc.rights.uri |
https://researchspace.auckland.ac.nz/docs/uoa-docs/rights.htm |
en |
dc.title |
Implanted ZnO Thin Films: Microstructure, Electrical and Electronic Properties |
en |
dc.type |
Journal Article |
en |
dc.identifier.doi |
10.1016/j.apsusc.2006.09.033 |
en |
pubs.issue |
9 |
en |
pubs.begin-page |
4317 |
en |
pubs.volume |
253 |
en |
dc.rights.holder |
Copyright: Elsevier B.V. |
en |
pubs.end-page |
4321 |
en |
dc.rights.accessrights |
http://purl.org/eprint/accessRights/RestrictedAccess |
en |
pubs.subtype |
Article |
en |
pubs.elements-id |
77722 |
en |
pubs.org-id |
Engineering |
en |
pubs.org-id |
Mechanical Engineering |
en |
pubs.org-id |
University management |
en |
pubs.org-id |
Office of the Vice-Chancellor |
en |
pubs.record-created-at-source-date |
2010-09-01 |
en |