Sputtered PZT thin films for MEMS devices
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Sputtered PZT thin films for MEMS devices
Giffney, Timothy
;
Yu, M
;
Zhang, H
;
Aw, Kean
Identifier:
http://hdl.handle.net/2292/37849
Issue Date:
2013-02-13
Rights:
Copyright: The authors
Rights (URI):
https://researchspace.auckland.ac.nz/docs/uoa-docs/rights.htm
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