Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper

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dc.contributor.author Tao, K en
dc.contributor.author Lye, SW en
dc.contributor.author Miao, J en
dc.contributor.author Tang, Lihua en
dc.contributor.author Hu, X en
dc.date.accessioned 2018-10-23T01:41:39Z en
dc.date.issued 2015 en
dc.identifier.issn 0960-1317 en
dc.identifier.uri http://hdl.handle.net/2292/43183 en
dc.description.abstract This paper presents the fabrication, modeling and characterization of an out-of-plane electret-based vibrational energy harvester (e-VEH) that has both positive and negative charged electret plates integrated into a single seismic mass system. Strong electrostatic spring-softening effect is induced due to the electric field provided by the double-charged electret plates. An elastic stopper is introduced for reliability concern by limiting the motion of seismic mass and meanwhile serves as a functional element to realize spring-hardening effect. The device has an overall volume of about 0.14 cm 3 and is fabricated based on MEMS compatible silicon micromachining technology. When subject to weak excitations, the device exhibits an approximately linear frequency response but changes to a significantly larger broadband when strongly excited due to the combined nonlinear effect from electrostatic force and a mechanical elastic stopper. At a high excitation level of 0.48 g, the experimental results show that the device has 3 dB bandwidths of 3.7 Hz for frequency-up sweep and 2.8 Hz for frequency-down sweep, respectively, which demonstrate a large enhancement compared to the linear response (1.3 Hz). An optimal output power of 0.95 μ W is also achieved with a low resonance of 95 Hz. This corresponds to a normalized power density of 37.4 μ W cm −3 g −2 . en
dc.relation.ispartofseries Journal of Micromechanics and Microengineering en
dc.rights Items in ResearchSpace are protected by copyright, with all rights reserved, unless otherwise indicated. Previously published items are made available in accordance with the copyright policy of the publisher. en
dc.rights.uri https://researchspace.auckland.ac.nz/docs/uoa-docs/rights.htm en
dc.title Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper en
dc.type Journal Article en
dc.identifier.doi 10.1088/0960-1317/25/10/104014 en
pubs.issue 10 en
pubs.begin-page 104014 en
pubs.volume 25 en
dc.rights.holder Copyright: The author en
pubs.author-url http://iopscience.iop.org/article/10.1088/0960-1317/25/10/104014/pdf en
pubs.end-page 104014 en
dc.rights.accessrights http://purl.org/eprint/accessRights/RestrictedAccess en
pubs.subtype Article en
pubs.elements-id 500011 en
pubs.org-id Engineering en
pubs.org-id Mechanical Engineering en
dc.identifier.eissn 1361-6439 en
pubs.number 10 en
pubs.record-created-at-source-date 2015-09-30 en


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