A 2DOF MEMS Vibrational Energy Harvester

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dc.contributor.author Tao, K en
dc.contributor.author Tang, Lihua en
dc.contributor.author Wu, J en
dc.contributor.author Miao, J en
dc.coverage.spatial Kuala Lumpur, Malaysia en
dc.date.accessioned 2018-11-05T02:32:15Z en
dc.date.issued 2018 en
dc.identifier.isbn 9781538642504 en
dc.identifier.issn 2159-3531 en
dc.identifier.uri http://hdl.handle.net/2292/43909 en
dc.description.abstract In this paper, a novel two-degree-of-freedom (2DOF) MEMS electromagnetic vibration energy harvesting system is proposed. The dual-mass resonant structure that comprises of a primary mass and an accessory mass is structured on silicon-on-insulator (SOI) wafer by double-sided deep reactive-ion etching (DRIE). Unlike previous 2DOF harvesters, the induction coil is only patterned on the primary mass for energy conversion. By carefully adjusting the weight of accessory mass, the first two resonances of the primary mass can be tuned close to each other while maintain comparable magnitudes. Therefore, both resonances could contribute to energy harvesting that make the system more efficient and adaptive in frequency-variant vibrational circumstances. With the current prototype, two close resonances with a frequency ratio of only 1.19 and comparable peaks are achieved, providing good validation for the modeling results. en
dc.publisher IEEE en
dc.relation.ispartof 2018 IEEE 8th International Nanoelectronics Conferences (INEC) en
dc.relation.ispartofseries 2018 IEEE 8th International Nanoelectronics Conferences (INEC) en
dc.rights Items in ResearchSpace are protected by copyright, with all rights reserved, unless otherwise indicated. Previously published items are made available in accordance with the copyright policy of the publisher. en
dc.rights.uri https://researchspace.auckland.ac.nz/docs/uoa-docs/rights.htm en
dc.subject Energy harvesting en
dc.subject Micromechanical devices en
dc.subject Vibrations en
dc.subject Resonant frequency en
dc.subject Fabrication en
dc.subject Etching en
dc.title A 2DOF MEMS Vibrational Energy Harvester en
dc.type Conference Item en
dc.identifier.doi 10.1109/INEC.2018.8441919 en
pubs.begin-page 9 en
dc.rights.holder Copyright: The author en
pubs.end-page 10 en
pubs.finish-date 2018-01-05 en
pubs.start-date 2018-01-03 en
dc.rights.accessrights http://purl.org/eprint/accessRights/RestrictedAccess en
pubs.subtype Proceedings en
pubs.elements-id 752399 en
pubs.org-id Engineering en
pubs.org-id Mechanical Engineering en
pubs.record-created-at-source-date 2018-08-29 en


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