Surface Profilometry of Curved Optics Using a Shack-Hartmann Sensor

Surface Profilometry of Curved Optics Using a Shack-Hartmann Sensor

Amani, Reza ; Tang, S ; Abbas, N ; Aguergaray, Claude ; Broderick, N
Identifier: http://hdl.handle.net/2292/51491
Issue Date: 2020-04
Rights: Copyright: The author
Rights (URI): https://researchspace.auckland.ac.nz/docs/uoa-docs/rights.htm

Abstract:

We report surface profilometry of curved optics against a flat optical reference within a deformation of ~120 nm and repeatability of RMS 2.3 nm using a 150 μm-spatial-resolution Shack-Hartmann wavefront sensor.

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