Surface Profilometry of Curved Optics Using a Shack-Hartmann Sensor

Amani, Reza; Tang, S; Abbas, N; Aguergaray, Claude; Broderick, N

dc.contributor.author	Amani, Reza	en
dc.contributor.author	Tang, S	en
dc.contributor.author	Abbas, N	en
dc.contributor.author	Aguergaray, Claude	en
dc.contributor.author	Broderick, N	en
dc.coverage.spatial	Yokohama, Japan	en
dc.date.accessioned	2020-06-11T22:45:13Z	en
dc.date.issued	2020-04	en
dc.identifier.uri	http://hdl.handle.net/2292/51491	en
dc.description.abstract	We report surface profilometry of curved optics against a flat optical reference within a deformation of ~120 nm and repeatability of RMS 2.3 nm using a 150 μm-spatial-resolution Shack-Hartmann wavefront sensor.	en
dc.description.uri	https://opicon.jp/	en
dc.relation.ispartof	The 9th Advanced Lasers and Photon Sources (ALPS2020)	en
dc.rights	Items in ResearchSpace are protected by copyright, with all rights reserved, unless otherwise indicated. Previously published items are made available in accordance with the copyright policy of the publisher.	en
dc.rights.uri	https://researchspace.auckland.ac.nz/docs/uoa-docs/rights.htm	en
dc.title	Surface Profilometry of Curved Optics Using a Shack-Hartmann Sensor	en
dc.type	Conference Item	en
dc.rights.holder	Copyright: The author	en
pubs.author-url	https://opicon.jp/conferences/alps	en
pubs.finish-date	2020-04-23	en
pubs.start-date	2020-04-20	en
dc.rights.accessrights	http://purl.org/eprint/accessRights/RestrictedAccess	en
pubs.subtype	Conference Paper	en
pubs.elements-id	798196	en
pubs.org-id	Science	en
pubs.org-id	Physics	en
pubs.record-created-at-source-date	2020-04-20	en
pubs.online-publication-date	2020-04-20	en